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M–Series: Mass Flow Meters

Product name:
M–Series: Mass Flow Meters

M–Series Mass Flow Meters simultaneously measure mass flow, volumetric flow, gas pressure, and gas temperature for 98+ gases from 0.01% to 100% of full scale.

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Certification number:

Alicat Scientific

7641 N. Business Park Drive
85743 Tucson, AZ
United States

David Davis
Tel 520 290-6060


Product description:

Full scale ranges: 0.5 SCCM to 5,000 SLPM (Devices are custom ranged)
Measurement range: 0.01% – 100% of full scale
Accuracy: ±0.6% of reading or ±0.1% of full scale, whichever is greater
Optional high accuracy: ±0.5% of reading or ±0.1% of full scale, whichever is greater
Repeatability: 0.1% of reading and 0.02% of full scale
Response time: <10 ms
Operating temperature: –10°C to +60°C
Full scale operating pressure: 160 PSIA (11 barA)



Build and performance options

Communication: Analog, RS–232, RS–485, Modbus RTU, Modbus TCP/IP, DeviceNet, EtherCAT, EtherNet/IP, Profibus, PROFINET

Process connections: NPT, SAE, AN, BSPP/G, compression, VCR, VCO

Displays: Backlit monochrome or color; integrated or panel–mount; none

Elastomers: FKM, FFKM, EPDM, Silicone

Calibration: Standard or high-accuracy; custom calibration points

Aggressive gas compatibility: Models with wetted materials compatible with many pure corrosive gases and most refrigerant gases, in addition to all non-corrosive gases and a variety of liquids are also available.



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